Radio Frequency Magnetron Sputtering of GdBa2Cu3O7−δ/ La0.67Sr0.33MnO3 Quasi-bilayer Films on SrTiO3 (STO) Single-crystal Substrates

作者： Ying Wang1,2, Zhen Li1,2, YongSheng Liu1, Yijie Li2, Linfei Liu2, Da Xu2, Xiaojing Luo1, Tian Gao1,3, Yanyan Zhu1,4, Luozeng Zhou3, Jianming Xu3 1Department of Physics, Mathematics, Shanghai Key Laboratory of Materials Protection and Advanced Materials in Electric Power,Shanghai University of Electric Power, 2Key Laboratory of Artificial Structure and Quantum Control, Ministry of Education, Department of Physics,Shanghai Jiao Tong University, 3Shanghai Institute of Space Power-sources, 4Shanghai Key Laboratory of High Temperature Superconductors,Shanghai University

简介：

Overview

This article presents a protocol for growing LSMO nanoparticles and Gd BCO films on SrTiO₃ single-crystal substrates using radio frequency sputtering. The method allows for uniform deposition of nanoparticles and films in the same vacuum chamber.

Key Study Components

Area of Science

• Nanoparticle synthesis
• Thin film deposition
• Superconducting materials

Background

• LSMO nanoparticles are important for various applications.
• GBCO films are known for their superconducting properties.
• Combining these materials can enhance performance in electronic devices.
• Utilizing the same vacuum chamber streamlines the deposition process.

Purpose of Study

• To develop a method for uniform growth of LSMO nanoparticles.
• To achieve high-quality GBCO films on single-crystal substrates.
• To provide insights into film and nanoparticle growth areas.

Methods Used

• Radio frequency sputtering technique.
• Deposition on (001) SrTiO₃ substrates.
• Utilization of a vacuum chamber for simultaneous deposition.
• Characterization of nanoparticle and film quality.

Main Results

• Uniform size of LSMO nanoparticles achieved.
• High-quality superconducting GBCO films deposited.
• Insights into the deposition process were gained.
• Method applicable for other metal film and nanoparticle deposition.

Conclusions

• The protocol allows for efficient deposition of nanoparticles and films.
• Researchers can learn about vacuum equipment and film growth technology.
• This method has potential applications in various fields of material science.

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